CAS WR200 / WR300 Platen Heater

Standard 200 mm and 300 mm cast-in aluminum platen heaters for semiconductor processing and R&D — aluminum 356 body, to 400 °C, ±0.3% surface temperature uniformity, bare or hard-anodized finish.

Key advantages

Cast-in reliability — heating element cast into aluminum 356; flatness <0.0005 in. (0.013 mm).
±0.3% uniformity — surface temperature uniformity of set point (lab ambient conditions).
To 400 °C (752 °F) — stock 200/300 mm footprints for trials, spares, and temporary repairs.
Ready to install — ultrasonic wash + IPA wipe; optional Type J/K thermocouples.

Typical applications

Semiconductor wafer processing and chamber pedestal/platen duty.
Prototype machine trials and engineering experiments.
Temporary replacements while custom heaters are manufactured.

Selection guide

WR200 — 9 in. (228.6 mm) OD × 1.25 in. (31.75 mm) thick; 1681 W @ 208 V (2241 W @ 240 V); 3× lift-pin holes on 3.25 in. circle.
WR300 — 13.78 in. (350 mm) OD × 1.575 in. (40 mm) thick; 3350 W @ 208 V; 3× lift-pin holes on 10 in. circle.
Finish — Hard anodize MIL-A-8525 Type III Class 1 (−2A) or bare machined (−2B).
Thermocouple options — None, or Type J/K with 6 in. or 12 in. sheath + fitting (see OEM order codes WR200/WR300 −3…−6 A/B).
Cleaning — Ultrasonic wash followed by IPA wipe-down before packaging.

Common mistakes

Ordering WR200 when the tool needs 300 mm (or vice versa).
Skipping hard anodize when process chemistry requires it.
Forgetting thermocouple type/length on the order code.
Heaters · Heater buying guide

When to RFQ / what to tell us

WR200 vs WR300; anodized vs bare.
Thermocouple type/length (or none); voltage (208/240 V).
Quantity; ship-to; any custom features.

Request a Quote · Get selection help

Specs

Spec	Value
SKU	37178
Brand	Cast Aluminum Solutions (CAS)
Model	WR200 / WR300
Product type	cast-aluminum platen heater
Measuring range	Operating temperature to 400 °C (752 °F)
Accuracy	Surface temperature uniformity ±0.3% of set point
Supply voltage	WR200: 1681 W @ 208 V (2241 W @ 240 V); WR300: 3350 W @ 208 V
Notes	Specs from CAS semiconductor wafer heater / 200 & 300 mm standard platen literature.

Documents

FAQ

Q: Anodized vs bare? A: −2A codes are hard-anodized (0.002 in. Type III Class 1); −2B are bare machined aluminum 356. State process needs on the RFQ.

Q: What should I send for a quote? A: Size, finish, TC option, voltage, quantity. Compatible with systems using CAS WR200/WR300 if you need a drop-in check — we do not claim authorized-dealer status.