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Alicat Scientific
Alicat Scientific MQ Series Mass Flow Meters
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Alicat MQ Series: mass flow meters; ±0.6% rdg or ±0.1% FS; to 320 PSIA; 0.1–100% FS. RFQ.
Download datasheet PDF
RFQ cart holds BOM lines only. Submit for engineering quote.
Key parameters
Accuracy
±0.6% of reading or ±0.1% of full scale, whichever is greater
Wetted parts
302/303/304/316L stainless; FKM, alumina ceramic, glass, gold, epoxy, silicone, polyamide, silicon
Display
Monochrome LCD or color TFT; mass flow, volumetric flow, temperature, pressure
Flow Range
Mid-flow sheet 10 SCCM–20 SLPM full scale; high-flow sheet also published to 12,000 SLPM
Repeatability
±0.1% of full scale
Turndown
0.1–100% of full scale
Fits higher-pressure gas mass flow metering where you need an Alicat Scientific MQ Series. Mass flow meters with mid-flow sheets about 10 SCCM–20 SLPM full scale (high-flow sheets published to 12,000 SLPM), accuracy ±0.6% of reading or ±0.1% FS whichever greater, repeatability ±0.1% FS, turndown 0.1–100% FS, and full-scale operating pressure to 320 PSIA.
Key advantages
- Accuracy — ±0.6% rdg or ±0.1% FS
- Pressure — Full-scale operating to 320 PSIA
- Turndown — 0.1–100% FS
- Range — Mid-flow to high-flow sheets
- Repeatability — ±0.1% FS
Typical applications
- Higher-pressure gas metering.
- Lab / process MQ meters.
- Multi-gas selectable flows.
Selection guide
- Full scale
- Gas / calibration
- Comms
Common mistakes
- Pressure above 320 PSIA FS.
- Wrong FS sheet.
- Unstated gas.
When to RFQ / what to tell us
- FS/gas/comms.
- Quantity, ship-to.
Request a Quote · Get selection help
Specs
| Spec | Value |
|---|---|
| SKU | 48576 |
| Brand | Alicat Scientific |
| Model | MQ Series |
| Product type | Mass Flow Meter |
| Flow range | Mid-flow sheet 10 SCCM–20 SLPM full scale; high-flow sheet also published to 12,000 SLPM |
| Accuracy | ±0.6% of reading or ±0.1% of full scale, whichever is greater |
| Repeatability | ±0.1% of full scale |
| Turndown | 0.1–100% of full scale |
| Operating pressure full scale | 320 PSIA |
Documents
FAQ
Q: Pressure? A: Full-scale operating to 320 PSIA.
Q: Accuracy? A: ±0.6% rdg or ±0.1% FS.
Q: What should I send for a quote? A: FS/gas/comms, quantity, ship-to.
Links
| Parameter | Value |
|---|---|
| Accuracy | ±0.6% of reading or ±0.1% of full scale, whichever is greater |
| Wetted parts | 302/303/304/316L stainless; FKM, alumina ceramic, glass, gold, epoxy, silicone, polyamide, silicon |
| Display | Monochrome LCD or color TFT; mass flow, volumetric flow, temperature, pressure |
| Flow Range | Mid-flow sheet 10 SCCM–20 SLPM full scale; high-flow sheet also published to 12,000 SLPM |
| Repeatability | ±0.1% of full scale |
| Turndown | 0.1–100% of full scale |
| Operating Pressure Full Scale | 320 PSIA |
| Operating Temperature | −10–60 °C |
| Pressure Accuracy | Above 1 atm ±0.5% of reading; below 1 atm ±0.07 PSIA |
| Min Operating Pressure | 11.5 PSIA common mode (consult Alicat for lower) |
| Max Operating Pressure | Damage possible above 400 PSIA common mode / 75 PSID |
| Ingress Protection | IP40 |
| Communications | RS-232 default; RS-485, Modbus RTU/TCP, DeviceNet, EtherCAT, EtherNet/IP, Profibus |
| Analog Io | 4–20 mA, 0–5 VDC, 1–5 VDC, 0–10 VDC |
| Power Requirements | 9–24 VDC, 40 mA (12–24 VDC, 80 mA with 4–20 mA or 0–10 VDC) |
| Gas Select | 98 user-selectable gases (NIST REFPROP); STP/NTP configurable |