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Alicat Scientific
Alicat Scientific MQ Series Mass Flow Meters
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Parámetros clave
Accuracy
±0.6% of reading or ±0.1% of full scale, whichever is greater
Wetted parts
302/303/304/316L stainless; FKM, alumina ceramic, glass, gold, epoxy, silicone, polyamide, silicon
Display
Monochrome LCD or color TFT; mass flow, volumetric flow, temperature, pressure
Flow Range
Mid-flow sheet 10 SCCM–20 SLPM full scale; high-flow sheet also published to 12,000 SLPM
Repeatability
±0.1% of full scale
Turndown
0.1–100% of full scale
| Parámetro | Valor |
|---|---|
| Accuracy | ±0.6% of reading or ±0.1% of full scale, whichever is greater |
| Wetted parts | 302/303/304/316L stainless; FKM, alumina ceramic, glass, gold, epoxy, silicone, polyamide, silicon |
| Display | Monochrome LCD or color TFT; mass flow, volumetric flow, temperature, pressure |
| Flow Range | Mid-flow sheet 10 SCCM–20 SLPM full scale; high-flow sheet also published to 12,000 SLPM |
| Repeatability | ±0.1% of full scale |
| Turndown | 0.1–100% of full scale |
| Operating Pressure Full Scale | 320 PSIA |
| Operating Temperature | −10–60 °C |
| Pressure Accuracy | Above 1 atm ±0.5% of reading; below 1 atm ±0.07 PSIA |
| Min Operating Pressure | 11.5 PSIA common mode (consult Alicat for lower) |
| Max Operating Pressure | Damage possible above 400 PSIA common mode / 75 PSID |
| Ingress Protection | IP40 |
| Communications | RS-232 default; RS-485, Modbus RTU/TCP, DeviceNet, EtherCAT, EtherNet/IP, Profibus |
| Analog Io | 4–20 mA, 0–5 VDC, 1–5 VDC, 0–10 VDC |
| Power Requirements | 9–24 VDC, 40 mA (12–24 VDC, 80 mA with 4–20 mA or 0–10 VDC) |
| Gas Select | 98 user-selectable gases (NIST REFPROP); STP/NTP configurable |