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Alicat Scientific
Alicat Scientific MCS Series Stainless Steel Mass Flow Controllers
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Ключевые параметры
Accuracy
Standard ±(0.8% reading + 0.2% FS); high-accuracy ±(0.4% reading + 0.2% FS) for ≥5 SCCM and ≤500 SLPM
Wetted parts
Stainless-steel anti-corrosive wetted path (see DOC-SPECS-MCS materials table)
Display
Monochrome LCD or color TFT; mass flow, volumetric flow, temperature, setpoint, pressure
Product Family
MCS / MCRS Series anti-corrosive stainless steel mass flow controllers
Flow Range
0.5 SCCM to 12,000 SLPM full scale
Repeatability
±0.2% of full scale (2σ)
| Параметр | Значение |
|---|---|
| Accuracy | Standard ±(0.8% reading + 0.2% FS); high-accuracy ±(0.4% reading + 0.2% FS) for ≥5 SCCM and ≤500 SLPM |
| Wetted parts | Stainless-steel anti-corrosive wetted path (see DOC-SPECS-MCS materials table) |
| Display | Monochrome LCD or color TFT; mass flow, volumetric flow, temperature, setpoint, pressure |
| Product Family | MCS / MCRS Series anti-corrosive stainless steel mass flow controllers |
| Flow Range | 0.5 SCCM to 12,000 SLPM full scale |
| Repeatability | ±0.2% of full scale (2σ) |
| Control Turndown | 1–100% of full scale (100:1) |
| Operating Pressure | 11.5–160 PSIA; damage possible above 200 PSIA common mode / 75 PSID |
| Operating Temperature | −10–60 °C (ambient and gas) |
| Ingress Protection | IP40 |
| Communications | RS-232/485, Modbus RTU/TCP, DeviceNet, EtherCAT, EtherNet/IP, PROFINET, PROFIBUS, IO-Link |
| Analog Io | 4–20 mA, 0–5 Vdc, 1–5 Vdc, 0–10 Vdc |
| Gas Select | 98+ user-selectable gases (Gas Select™ / NIST REFPROP) |