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Aalborg
Aalborg GFM Thermal Mass Flow Meter
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Ключевые параметры
Accuracy
±1% FS (GFM 17/37/47); ±1.5% FS (GFM 57/67/77)
Type
Low-cost thermal mass flow meter for clean gases (GFM)
Repeatability
±0.25% of full scale
Flow Ranges
From 0–10 sccm to 0–1000 slpm N2 (model dependent)
Max Pressure
1000 psig (69 bar) GFM 17/37/47; 500 psig GFM 57/67/77
Outputs
Linear 0–5 VDC and 4–20 mA; optional tiltable LCD
| Параметр | Значение |
|---|---|
| Accuracy | ±1% FS (GFM 17/37/47); ±1.5% FS (GFM 57/67/77) |
| Type | Low-cost thermal mass flow meter for clean gases (GFM) |
| Repeatability | ±0.25% of full scale |
| Flow Ranges | From 0–10 sccm to 0–1000 slpm N2 (model dependent) |
| Max Pressure | 1000 psig (69 bar) GFM 17/37/47; 500 psig GFM 57/67/77 |
| Outputs | Linear 0–5 VDC and 4–20 mA; optional tiltable LCD |
| Materials | Anodized aluminum/brass or 316 SS with FKM (optional Buna/EPR/FFKM) |
| Leak Integrity | 1×10⁻⁹ sccs He max |
| Document | Aalborg GFM product page + TD9411M Rev W operating manual (PDF download blocked this pass) |